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Evaluation of RPCVD technology is carried out with AIX 2800G4-HT system.
January 3, 2019
By: Anthony Locicero
Copy editor, New York Post
AIXTRON SE said it is collaborating with BluGlass Limited to evaluate BluGlass’ unique remote plasma deposition technology. BluGlass selected the AIX 2800G4-HT system for the scaling of RPCVD to mass production capacities. AIXTRON’s Planetary Reactor delivers class-leading semiconductor film uniformity due to its proprietary dual axis of wafer rotation during deposition. RPCVD technology enables low-temperature deposition of III-V nitrides which could potentially improve the performance of devi...
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